The characteristic features of
Surface Micromachining Technology (SMT) is characterized by the fabrication of micromechanical structures created from thin films. In surface micromachining, thin films of polycrystalline silicon, silicon nitride or silicon dioxide are etched out by chemical vapor deposition
tobuild three-dimensional IC structures
. This isa process dating back to the 1960s, which has been increasingly used in recent years for the manufacture of micromechanisms and sensors
in microsystems technology. The SMT process can be used to realize components with complex structures and high aspect ratios and to manufacture them in large quantities, including those with tilting mechanisms, such as capacitors that change their capacitance by tilting the capacitor plates.