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microsensor

Microsensors are miniature sensors of only a few millimeters in size. Like other sensors, microsensors are suitable for recording physical and chemical variables such as pressure, humidity, temperature, acceleration, vibration, inclination and gas concentrations.

Microsensors are characterised by their compact, small design and, above all, by their excellent characteristic values for sensitivity, accuracy and dynamics. Due to the compactness of microsensors, they can be used in all technical, environmental and many medical applications. Technical applications without the use of microsensors are hardly imaginable.

Microsensor for oxygen, Photo: presenc.de

Microsensor for oxygen, Photo: presenc.de

Beoi most microsensors are mechanical sensors, such as MEMS sensors or inertial sensors. They cover a wide range of physical measurands. The other large area of application is in the acquisition of chemical and biochemical values, as they occur in environmental technology and in health care. For example, in glucose measurements, in the composition of gases, the measurement of pH values and much more.

MEMS acceleration sensor, Photo: theenergycollective.com

MEMS acceleration sensor, Photo: theenergycollective.com

Microsensors can be constructed conventionally using hybrid technology or as a system-on-chip (SoC). In the hybrid design, the sensor is attached to a substrate. The actual circuitry is separate and connected to the sensor via a coupling element. System-on-chip technology is different. This technology differs in that the substrate with the sensor and the electronic circuit is fixed to the base plate of the package and is manufactured in a single operation.

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Englisch: microsensor
Updated at: 15.01.2021
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Translations: DE