Microsystems technology (MST), Micro Electro Mechanical System (MEMS), is a multifaceted discipline that was dominated by microelectronics and micromechanics in its early days.
Since these beginnings, microsystems engineering has evolved into a high technology incorporating all microtechnologies such as microoptics and microfluidics, but also nanotechnology and computer science.
Its field of application touches all areas of daily life, from medicine to automotive technology, from computer technology to environmental technology, from household technology to communication technology, from building technology to traffic technology.
Whether MEMS microphones and MEMS loudspeakers in cell phones and hearing aids, print heads ofinkjet printers, read/write heads of tape drives, hard disk drives, CD or DVD drives, Mirasol display, MEMS memory, micromirrors in optical switches, acoustic wave filters, RF filters, RF MEMS switches, MEMS sensors for rotary motion, speed, inertia, pressure and acceleration, digital light processing( DLP) with micromirrors, diffraction gratings in grating light valves( GLV) as used in projectors, MEMS resonators, MEMS actuators for zoom and autofocus in digital cameras and camcorders, micropumps or the optical sensors in wireless mice, microsystems technology is one of the important standard technologies in information technology.
The further development of microsystems technology towards more compact and even smaller components is reflected in NEMS technology, Nano Electro Mechanical System (NEMS).