As density has increased by many powers of ten over the course of development, the term Large Scale Integration (LSI) has been introduced to describe the number of devices on a chip. LSI devices have an integration density of one thousand (`10^3`) to ten thousand (`10^4`) transistors per chip and were developed in the mid-1960s. The structure width for LSI technology was 10 µm to 50 µm. Analog-to- digital circuits, memory devices and microprocessors were implemented in this technology.
The successor technology of Large Scale Integration is Very Large Scale Integration( VLSI).